| Measuring
System |
Stylus method using
Inductive (LVDT) Pick-up with interchangeable Styli, Skid and Skidless mode of operation. |
| Measurement
parameters |
Ra(Ra75), Rq, RMS, Ry, Rmax,
Rz, Sm, tp, SK, Kr, Rp, Rv, Pc, PPI, HSC, Rpm, Rz3, R3zmax, R3z, a, q, a, q, Dq, RK, Rpk, Rvk,
MR1, Mr2, WCA, WCM, BC, ADC. |
| Profile
|
Un-filtered, Filtered
(Roughness), Filtered Waviness, Filtered Centerline Waviness |
| Measuring
range |
800µm(1,600µm*) |
80µm(160µm*) |
8µm(16µm*) |
- |
| Magnification
|
Vertical |
100, 200, 500,1,000 |
2,000, 5,000, 10,000
|
20,000, 50,000, |
Auto |
| Horizontal |
1, 2, 5,
10, 20, 50, 100, 200, 500,1000, Auto. |
| Resolution |
0.5nm(min.) |
| Cut-off |
Roughness |
0.08, 0.25, 0.8, 2.5, 8mm
and un-filtered. |
| Waviness |
f l 0.25, 0.8, 2.5,
8mm-fho.08, 0.25, 0.8, 2.5mm and fh0.08, 0.25, 0.8, 2.5mm. |
| Filter |
Gaussian / 2CR / Special
Gaussian. |
| Measuring
length |
Evaluation length : c x 1, x 2, x 3, x 4, x
5 times 0.25, 0.8, 2.5, 8, 25mm. (Selectable up to 30mm with real time recording). |
| Drive
speed |
0.05,0.1, 0.5, 1,2mm/s |
| Data
display |
320 x 240 dots LCD. |
| Data
recording |
8 dots/mm graphic printer; recording width:
56mm; paper width 59mm; length 25 meters. |
| Measurement
mode |
Normal, average, multiple
continuous, cut-out, parabola, externally controlled measurement mode. |
| Applicable
standards |
ISO, ANSI, BS, DIN(90/85),
DIN4776, JIS(94/82), and JIS waviness. |
| Instrument
calibration V/H |
Both directions (automatic
calibration/coefficient calibration). |
| Partial
cut-out; |
Surface profile to be
cut-out selected in display window. |
| Measuring
conditions memory |
Stores two sets of data.
Equipped w/ memory card driver (16 memories / card). |
| Data
output |
RS232C |
| Acceptability
judgment |
Possible with 3 parameters. |
| Statistical
processing |
X, R, Max, Mm, S, Sigma, X-R
control chart, frequency distribution table, X-R control chart, histogram. |
| Real
time recording |
Surface profiles direct in
display and printer at same time. |
| Print
out data |
Selectable each item to
print-out, 2 steps of automatic feed,
comment (alphanumeric and symbols), date and time. |
| Auxiliary
functions |
Meter/inch switching,
Japanese/English display switching, repeated arithmetic processing, selectable return
speed, selectable prelength, auto return, motorized up/down by optional column. Measuring
conditions in data printout / display. |
| Drive
unit |
50-mm vertical pick-up
movement with 5mm fine adjustment, leveling ±1.5° |
| Straightness
accuracy |
0.3µm/30mm or less. |
| Stylus/contact
force |
R2µm diamond, 0.7mN. |
| Skid |
R40mm (measuring direction)x
R2mm made of sapphire. |
| Power
supply |
85-264 VAC, 50/60Hz. |
| Ambient
temp/humidity (operation) |
10-35°C, 80% RH or lower,
no dew condensation. |
| Ambient
temp/humidity (storage) |
0-50°C, 90% RH or lower, no
dew condensation. |
| Size/weight |
Pick-up 17mm-L80mm/70g; Drive
unit: W168 x D74 x H70mm / 0.9kg Amplifier: W168 x D360 x H150mm/4.5kg. |
|